Analysis of Quartz Resonator Array Based on Data Fusion Technology for High Performance Thermal Sensors
نویسندگان
چکیده
In order to improve the accuracy and reliability of temperature measurements, put forward a kind of high precision non-contact temperature measuring system, which is composed of the quartz temperature sensor array and microprocessors. The sensor used by the system is the quartz tuning fork non-contact temperature sensor based on polymer line, and the polymer line that is highly sensitive to temperature is as the sensitive element, in combination with quartz tuning fork resonator that is not sensitive to the temperature , and they form the high precision temperature sensor together. Compared with the traditional thermometry, set up a new temperature sensor array to measure temperature, which uses the Bayes estimation to fuse the data measured by the temperature sensor array, and calculate the accurate temperature measurements. The experimental results shown that the measurement precision of sensing system is 0.02°C, and the sensitivity is 71.5×10 -6 /°Cwithin temperature range from 0°C to 100°C.The system has advantages of the high precision, and the good stability, and reliable performance, etc.
منابع مشابه
Design and Simulation of a Fluidic Micro-Bio-Sensor Based on Resonator Array
In this paper, a fluidic biosensor with possibility to fabricate by Micro-Electro-Mechanical Systems (MEMS) technology is proposed for biomedical mass detection and lab-on-chip applications. This is designed by electromechanical coupling of harmonic micromechanical resonators with harmonic springers as a mechanical resonator array. It can disperse mechanical wave along the array by electrostati...
متن کاملPerformance Enhancement of GPS/INS Integrated Navigation System Using Wavelet Based De-noising method
Accuracy of inertial navigation system (INS) is limited by inertial sensors imperfections. Before using inertial sensors signals in the data fusion algorithm, noise removal method should be performed, in which, wavelet decomposition method is used. In this method the raw data is decomposed into high and low frequency data sets. In this study, wavelet multi-level resolution analysis (WMRA) techn...
متن کاملAnalytical Study of Optical Bi-Stability of a Single-Bus Resonator Based on InGaAs Micro-Ring Array
In this paper, for the first time to our knowledge, we investigate the optical bi-stability in a compact parallel array of micro- ring resonators with 5μm radius, induced by optical nonlinearity. Due to the nature of perfect light confinement, resonance and accumulation process in a ring resonator, optical nonlinear effects, even at small optical power of a few milliwatts in this structure are ...
متن کاملComparison of force sensors for atomic force microscopy based on quartz tuning forks and length-extensional resonators
The force sensor is key to the performance of atomic force microscopy (AFM). Nowadays, most atomic force microscopes use micromachined force sensors made from silicon, but piezoelectric quartz sensors are being applied at an increasing rate, mainly in vacuum. These self-sensing force sensors allow a relatively easy upgrade of a scanning tunneling microscope to a combined scanning tunneling/atom...
متن کاملInterface circuits for quartz crystal sensors in scanning probe microscopy applications
Complementary to industrial cantilever based force sensors in scanning probe microscopy SPM , symmetrical quartz crystal resonators QCRs , e.g., tuning fork, trident tuning fork, and needle quartz sensors, are of great interest. A self-excitation scheme with QCR is particularly promising and allows the development of cheap SPM heads with excellent characteristics. We have developed a high perfo...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2014